Patent holdings for IPC class H01J 37/141

Total number of patents in this class: 250

10-year publication summary

22
14
20
17
32
30
19
19
19
6
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
4424
37
Hitachi High-Technologies Corporation
2034
23
ASML Netherlands B.V.
6816
23
NuFlare Technology, Inc.
770
20
JEOL Ltd.
556
11
Carl Zeiss Microscopy GmbH
1146
8
Matsusada Precision, Inc.
33
7
FEI Company
851
6
Varian Semiconductor Equipment Associates, Inc.
1282
5
Advantest Corporation
1939
5
KLA-Tencor Corporation
2574
5
Hermes Microvision Incorporated B.V.
129
5
KLA Corporation
1223
5
Hitachi, Ltd.
16452
4
Applied Materials Israel, Ltd.
549
3
IMS Nanofabrication GmbH
56
3
Riken
1669
3
Carl Zeiss MultiSEM GmbH
85
3
Balakin, Andrey Vladimirovich
65
3
Balakin, Pavel Vladimirovich
65
3
Other owners 68